FSPS® Thermal Spray Coating services provided by FM INDUSTRIES™ have a proven track record in meeting the most difficult and complex coating challenges. As clients in the semiconductor industry know, our thermal spray coatings offer high performance and durability. Using our proprietary FSPS® robotically controlled coating systems and services, we provide a vast line of simple to complex ceramic oxide coatings meeting the strictest industry requirements. We work with materials such as Yttria, Alumina, Yttria stabilized Zirconia, composite blends, co-phase coatings, and can develop custom coatings to fit specific application needs. Our coatings have low plasma erosion, high adhesion, high service temperature, high dielectric strength, low porosity and meet the stringent trace metal and particle requirements of the semiconductor industry. SPY-100® and ALC-SP® are the latest advanced coating services that provide low particle generation and wet cleaning resistance with customization for specific applications for semiconductor tools.

FM INDUSTRIES™, Inc. offers customized solutions to coatings and manufacturing challenges. Our expert chemical, mechanical, and material sciences engineering staff routinely manage complex application development projects. FM INDUSTRIES™ have a fully equipped Research and Development laboratory that is actively working on “next generation” coatings and materials for 20nm technology and beyond. We regularly apply customized coating solutions on complex part geometries and various substrate materials. Our most common substrate is aluminum, both anodized and bare, but are experienced with a variety of other materials.

FM Industries Advanced Coatings® Products & Services

FMI™ Capabilities

Product/Services
  • Thermal Spray Coating Application on Manufactured Products
Additional Services
  • Rapid Prototyping
  • Research & Development
  • Full R&D Analytical Lab
  • Custom Coating Creation
Coating Capabilities & Characteristics
  • Semiconductor grade controlled- purity
  • Corrosion Resistance
  • High Service Temperature
  • High Dielectric Strength
  • Low Plasma Erosion
  • Low particle generation
  • High Adhesion
  • Low Porosity
Coating Materials
  • Yttria
  • Yttria Stabilized Zirconia
  • Composite & Custom Blends
  • Alumina
  • Co-phase & Complex Oxides
Material Finish
  • As-sprayed < 175 micro-inch Ra
  • Finishable < 30 micro-inch Ra
Substrate
  • Anodized Aluminum
  • Bare Aluminum
  • Ceramics and Any Other
Pre-Coating Preparation
  • Precision Part Cleaning
  • Robotic Surface Preparation
  • High Purity Grit/Glass
Industry Focus
  • Semiconductor
  • Solar
Typical Lead Time
  • 1 week and up
Standards Met
  • Customer supplied print, 3D CAD Drawing, Clean room ready parts
Efficiency
  • ISO Certified, Well proven performance in semiconductor tools

Thermal Spray Services from FM Industries Advanced Coatings® for the Semiconductor Industry

FM Industries, Inc. offers customized solutions to manufacturing challenges. As clients in the semiconductor industry know, our thermal spray coatings offer high corrosion resistance with high bonding strength to ensure durability. Using our proprietary FSPS® robotically controlled coating Systems and services, we provide a vast line of simple to complex ceramic oxide coatings meeting the strictest industry requirements. Complex part geometries are not a problem for us at FMI™. We work with materials such as Yttria, Alumina, Yttria stabilized Zirconia, composite blends, co-phase coatings, and custom blends. Our coatings have low plasma erosion and high bond strength and can operate in temperatures of >300°C. SPY-100® and ALC-SP™ are the latest advanced coating services that provide low particle generation and wet cleaning resistance.

For more information on thermal spray Coatings and service for the semiconductor industry, please see the table below or contact us directly.

FMI™ Products/Services

Product/Services
  • Thermal Spray Coatings are used to coat manufactured products.
Custom Thermal Spray Coatings Capabilities Applied/Processes
  • High Corrosion Resistance
  • Ability to operate in temperatures >300C
  • Low plasma erosion coatings
  • High bond strength
Features
  • Can coat complex geometries
  • Temperature Range: > 300C
Tightest Tolerances
  • Can hold +/- .0001″ per mil of coating
Material Used
  • Yttria
  • Alumina
  • Yttria Stabilized Zirconia
  • Composite Blends
  • Co-phase Coatings
  • Custom Blends
Material Finish
  • As-sprayed – 175 min Ra
  • Grind able to < 30 min Ra
Industry for Use
  • Material Science Industry
  • Manufacturing Industry Semiconductor and Solar Industries
Delivery/Turnaround Time
  • Rapid Prototype in as little as 1 Week for existing products
Standards Met
  • Customer supplied print, 3D CAD Drawing
Product Name
  • Thermal Spray Coatings